Sputtering and Evaporator Systems

Precision systems tailored for you. Every CPA system is engineered with process visibility, repeatability, and upgrade paths in mind. Whether you’re developing a new material stack or refining a mature process, CPA adapts to your workflow—not the other way around.

CPA H3000

Belljar 1000

The CHA 1000 is a smaller version of the Mark series with all the capabilities. Great for saving space and getting you a production or R&D work.

The H3000 is an inline single pallet sputter down system that can give you up to 30" wide sputter zone.

CPA H2000

The H2000 is an inline single pallet sputter down system that can give you up to 20" wide sputter zone.

CPA 9900

The 9900 is an inline sputter down system that can give you up to 12" wide sputter zone. Capable of having a 28 pallet indexer for higher throughput.

CPA 9895

The 9895 is an inline sputter down system that can give you up to 10" wide sputter zone. Capable of having a 20 pallet indexer for higher throughput.

Perkin Elmer 4450

The 4450 is a sputter down system with a rotating table that can give you up to 8" wafers. Systems are designed for sputtering and etching. Comes with a load lock that permits wafer loading without breaking vacuum in the process chamber

Perkin Elmer 2400-8L

The 2400-8L is a sputter down system with a rotating arm that can handle a 6" wafer. This systems is designed for sputtering and etching. Comes with a load lock that permits wafer loading without breaking vacuum in the process chamber

Perkin Elmer 2400

The 2400 is a sputter down system with a rotating table that can handle up to 8" wafers. This systems is designed for sputtering and etching.

Varian XM 2000

The XM 2000 is a computer upgraded XM 90 with sputter down cassette to cassette transfer. Capable of handling up to 6" wafers. This systems is excellent tool for depositing metals.

Varian 3XXX Series

The Varian 3xxx series is a cassette to cassette sputter machine that can handle 4", 5", and 6" wafers. The different versions are the 3180, 3190, 3280, and 3290. This systems is excellent tool for depositing metals.

MK-50

The Mark 50 series is an evaporator machine that can handle up to 8" wafers. This system has the capability of heat, ion sources, thermal, or evaporation.

MK-40

The Mark 40 series is an evaporator machine that can handle up to 6" wafers. This system has the capability of heat, ion sources, thermal, or evaporation.